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| |
Travel |
35 mm
|
35 mm
|
60 mm
|
60 mm
|
Accuracy(1) |
¡¾3 ¥ìm
(¡¾120 ¥ìin) |
¡¾300 nm
(¡¾12 ¥ìin) |
¡¾3 ¥ìm
(¡¾120 ¥ìin) |
¡¾300 nm
(¡¾12 ¥ìin) |
Resolution |
2 nm
(0.08 ¥ìin) |
2 nm
(0.08 ¥ìin) |
2 nm
(0.08 ¥ìin) |
2 nm
(0.08 ¥ìin) |
Repeatability
(Bi-Directional)(1) |
¡¾100 nm
(¡¾4 ¥ìin) |
¡¾75 nm
(¡¾3 ¥ìin) |
¡¾100 nm
(¡¾4 ¥ìin) |
¡¾75 nm
(¡¾3 ¥ìin) |
Repeatability
(Uni-Directional) |
¡¾50 nm
(¡¾2 ¥ìin) |
¡¾50 nm
(¡¾2 ¥ìin) |
¡¾50 nm
(¡¾2 ¥ìin) |
¡¾50 nm
(¡¾2 ¥ìin) |
Straightness(1) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
Flatness(1) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
¡¾2.0 ¥ìm
(¡¾80 ¥ìin) |
Pitch |
10 arc
sec |
10 arc
sec |
10 arc
sec |
10 arc
sec |
Roll |
10 arc
sec |
10 arc
sec |
10 arc
sec |
10 arc
sec |
Yaw |
5 arc
sec |
5 arc
sec |
5 arc
sec |
5 arc
sec |
Maximum Speed
|
200
mm/s (8 in/s) |
200
mm/s (8 in/s) |
200
mm/s (8 in/s) |
200
mm/s (8 in/s) |
Maximum
Acceleration |
1 g -
10 m/s2 (No Load) |
1 g -
10 m/s2 (No Load) |
1 g -
10 m/s2 (No Load) |
1 g -
10 m/s2 (No Load) |
In-Position
Stability(2) |
<2
nm (<0.08 ¥ìin) |
<2
nm (<0.08 ¥ìin) |
<2
nm (<0.08 ¥ìin) |
<2
nm (<0.08 ¥ìin) |
Maximum Force
(Continuous) |
23 N
|
23 N
|
23 N
|
23 N
|
Load
Capacity(3) |
Vertical |
10 kg
(22 lb) |
10 kg
(22 lb) |
10 kg
(22 lb) |
10 kg
(22 lb) |
Moving Mass |
1.2 kg
(2.6 lb) |
1.2 kg
(2.6 lb) |
1.4 kg
(3.1 lb) |
1.4 kg
(3.1 lb) |
Stage Mass |
4.3 kg
(9.6 lb) |
4.3 kg
(9.6 lb) |
5.2 kg
(11.5 lb) |
5.2 kg
(11.5 lb) |
Material |
Aluminum
Body/Black Hardcoat Finish |
MTBF (Mean Time
Between Failure) |
30,000
Hours |
Notes: 1. Certified with each stage. 2.
In-Position Jitter listing is 3 sigma value. 3. Axis orientation for on-axis
loading is listed. 4. Air supply must be clean, dry to 0¡ÆF dew point and
filtered to 0.25 ¥ìm or better; recommend nitrogen at 99.9% purity. Supply
pressure is determined by the amount of payload carried by the stage. •
Specifications are per axis, measured 25 mm above the tabletop. Performance of
multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications. • -PLUS requires the use of an
Aerotech controller.
Drive System
|
Brushless
Linear Servomotor |
Feedback |
Noncontact Linear Encoder |
Maximum Bus
Voltage |
¡¾40 VDC
|
Limit Switches
|
5 V,
Normally Closed |
Home Switch
|
Near
Center |
Multi-Axis |
A3200 |
Npaq-MXR
Npaq MR-MXH Ndrive ML-MXH |
Ensemble |
Epaq-MXH
Epaq MR-MXH Ensemble ML-MXH |
Single Axis
|
Soloist |
Soloist
ML-MXH |
Notes: 1. Linear amplifiers are required to
achieve the listed specifications. Other options are available.
Note: To ensure the achievement and
repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25¨¬C/24 hours. If this is not
possible, alternate products are available. Please consult Aerotech Sales
Engineering for more information.
|
ANT130-L-Z Series Vertical Stage |
ANT130-LZ |
Aerotech¡¯s nanotranslation crossed-roller vertical
positioner
|
Linear Stage Travel |
ANT130-035-L-Z |
35 mm vertical travel stage with proprietary direct-drive motor technology, 1
Vp-p sinusoidal output linear encoder and limits |
ANT130-035-L-Z-PLUS |
35 mm vertical travel stage with proprietary direct-drive motor technology, 1
Vp-p sinusoidal output linear encoder and limits (High Accuracy
Version) |
ANT130-060-L-Z |
60 mm vertical travel stage with proprietary direct-drive motor technology, 1
Vp-p sinusoidal output linear encoder and limits |
ANT130-060-L-Z-PLUS |
60 mm vertical travel stage with proprietary direct-drive motor technology, 1
Vp-p sinusoidal output linear encoder and limits (High Accuracy
Version) |
Options |
-25DU |
Single 25-pin D (standard) |
-4DU-25DU | |