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Dual-Axis Linear Nanopositioners

¿¡¾î·ÎÅØÀÇ 2Ãà ¸®´Ï¾î ³ª³ëÆ÷Áö¼Å³Ê´Â ANT95-XY¹× ANT130-XY¸¦ Æ÷ÇÔÇÕ´Ï´Ù. ÀÌ·¯ÇÑ Å©·Î½º ·Ñ·¯ º£¾î¸µ, ´ÙÀÌ·ºÆ® µå¶óÀ̺ê 2Ãà ¸®´Ï¾î ½ºÅ×ÀÌÁö µÑ ´Ù 1nm ºÐÇØ´É, <1nm Á¤À§Ä¡ ¾ÈÁ¤¼º, ±250nmÀÇ 2Â÷¿ø Á¤È®¼ºÀ» Á¦°øÇÕ´Ï´Ù. ANT130-XYÀÌ 60, 110, 160mmÀÇ À̵¿±¸°£ ¹× 12kg±îÁö ºÎÇϸ¦ Á¦°øÇÏ´Â ¹Ý¸é¿¡ ANT95-XY´Â 25 x 25 ¶Ç´Â 50 x 50 mmÀÇ À̵¿±¸°£ ¹× 4.0 ¶Ç´Â 6.0 kgÀÇ ºÎÇϸ¦ Á¦°øÇÕ´Ï´Ù. ±×µéÀº ½ÇÇè½ÇÀ̳ª ¿¬Áß ¹«ÈÞ Á¦Á¶ ȯ°æ¿¡¼­ µ¿ÀÏÇÏ°Ô ¼³°èµÇ¾ú½À´Ï´Ù.

¿ì¼öÇÑ Á¤È®µµ, À§Ä¡ ¹Ýº¹µµ, Á¤À§Ä¡ ¾ÈÁ¤µµ´Â ³ôÀº ½Ã½ºÅÛ ºÐÇØ´ÉÀ» ¿ä±¸ÇÕ´Ï´Ù. ANT95-XY¹× ANT130-XY 1nm ÃÖ¼Ò ÁõºÐ ´Ü°è »çÀÌÁî´Â ÀÌ·¯ÇÑ ³ôÀº ¼öÁØÀÇ ¼º´ÉÀ» Á¦°øÇÕ´Ï´Ù. ³ôÀº Ç°Áú¿¡ ÀÇÇÑ ÈǸ¢ÇÑ Á¤À§Ä¡ ¾ÈÁ¤µµ, ¾ÈƼ Å©¸³ Å©·Î½º ·Ñ·¯ º£¾î¸µÀº Á¦Ç°ÀÇ ¼ö¸í µ¿¾È »ç½Ç»ó °ü¸®°¡ ÇÊ¿ä ¾ø´Â ÀÛµ¿À» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù. ¿¡¾î·ÎÅØÀÇ ´ÙÀÌ·ºÆ® µå¶óÀÌºê ±â¼úÀº ÀÌ·ÂÇö»ó ¶Ç´Â ¹é·¡½Ã°¡ ¾ø°í, Á¤È®ÇÏ°í ¹Ýº¹ÀûÀÎ ³ª³ë¹ÌÅÍ ±Ô¸ð ¸ð¼ÇÀ» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù.

¿¡¾î·ÎÅØÀÇ ³ª³ëÆ÷Áö¼Å³Ê´Â µ¶¸³Çü ´ÜÀ§ ¶Ç´Â ¿¡¾î·ÎÅØÀÇ ÀÚü ÄÁÆ®·Ñ·¯ ¹× µå¶óÀ̺긦 Æ÷ÇÔÇÏ¿© ¿ÏÀüÇÑ À§Ä¡ ÆÐÅ°Áö·Î Á¦°ø¹Þ½À´Ï´Ù.

ANT95-XY NanoTranslation, Two Axis,
Crossed-Roller Bearing Linear Stage
ANT95-XY-ULTRA NanoTranslation, Two Axis,
Mechanical Bearing Linear Stage
nanotechnology nanotechnology

¿¡¾î·ÎÅØÀÇ ³ª³ëÀ̵¿ (ANT) Å©·Î½º·Ñ·¯ º£¾î¸µ, ¸®´Ï¾î ¸ðÅÍ, ÀÌÁßÃà ½ºÅ×ÀÌÁö´Â ÃֽŠÃâ½ÃÁ¦Ç°À¸·Î¼­ ANT ½Ã¸®Áî ½ºÅ×ÀÌÁöÀÇ Çõ¸íÀ» À̾°¡°í ÀÖ½À´Ï´Ù. ANT95-XY¿Í ANT94-XY-H´Â 3°³ÀÇ ±¸¼ºÇ°À¸·Î ÀÌ·ïÁø µðÀÚÀÎÀ¸·Î, 2Â÷¿ø(X ¹× Y)ÀÇ À̵¿À» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù. »ê¶æÇÑ µðÀÚÀÎÀº ´Ü 60mm¶ó´Â ±ØµµÀÇ Àú»óÇü Á¦Ç°À» °ø±ÞÇÕ´Ï´Ù. ½ºÅ×ÀÌÁö´Â °íÀ¯ÀÇ ´ÙÀÌ·ºÆ®µå¶óÀÌºê ¸ðÅÍ ±â¼úÀÇ °á°úÀ̸ç, ºñÁ¢ÃË ¸®´Ï¾î ¿£ÄÚ´õ, ¸®¹ÌÆ®, ÅëÇÕ ¹è¼±°ü¸®½Ã½ºÅÛ ¹× 2°³ µî±ÞÀÇ Á¤È®µµ¸¦ Á¦°øÇÕ´Ï´Ù.

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¿¡¾î·ÎÅØÀÇ ANT95-XY-ULTRA´Â XYÀÀ¿ëºÐ¾ß¿¡ ´ëÇØ ±ä À̵¿±¸°£(50mm x 50mm±îÁö) ³ª³ëÆ÷Áö¼Å³ÊÀÔ´Ï´Ù. °¢ ÃàÀº ÄÚÅ·ÀÌ ¾ø°í ¡°0¡±¹é·¡½Ã ¸ð¼Ç¿¡ ´ëÇØ ¿¡¾î·ÎÅØÀÇ À¯ÀÏÇÑ ´ÙÀÌ·ºÆ® µå¶óÀ̺ê»Ó¸¸ ¾Æ´Ï¶ó Å©·Î½º ·Ñ·¯ º£¾î¸µ »ç¿ëÇÕ´Ï´Ù. ¶ÇÇÑ, °¢ ½ºÅ×ÀÌÁö´Â ÇÊÀûÇÒ ¼ö ¾ø´Â ³ª³ë¹ÌÅÍ ºÐÇØ´É, Á¤È®¼º, ¹Ýº¹¼ºÀ» ÀÌ·ç±â À§Çؼ­ 2Â÷¿ø º¸Á¤À» ¹Þ½À´Ï´Ù.

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1 nm Best-In-Class Resolution
linear tables

1 nm step plot for ANT95-XY

1 nm Best-In-Class Resolution
linear tables

1 nm step plot for ANT95-XY-ULTRA

Max Travel
25 x 25 or 50 x 50 mm
Accuracy
±250 nanometers
Speed
500 mm/s
Load
6.0 kg
Max Travel
25 x 25 or 50 x 50 mm
Accuracy
±250 nanometers
Speed
500 mm/s
Load
6.0 kg
ANT130-XY NanoTranslation, Two Axis,
Crossed-Roller Bearing Linear Stage
ANT130-XY-ULTRA NanoTranslation, Two Axis,
Mechanical Bearing Linear Stage

ANT130-XY Å©·Î½º·Ñ·¯ º£¾î¸µ, ¸®´Ï¾î ¸ðÅÍ, dualÃà ½ºÅ×ÀÌÁö´Â ANT½Ã¸®Áî ½ºÅ×ÀÌÁöÀÇ ÁøÈ­¸¦ °è¼ÓÇÕ´Ï´Ù. ANT130-XY¿Í ANT130-XY-H´Â 3°³ÀÇ ±¸¼ºÇ°À¸·Î ÀÌ·ïÁø ¼³°è·Î, 2Â÷¿ø(X¿Í Y)ÀÇ À̵¿À» °¡´ÉÇÏ°Ô ÇÕ´Ï´Ù. À¯¼±ÇüÀÇ ¼³°è´Â 60 x 60 mm, 110 x 110 mm¿Í 160 x 160 mm¸¦ Æ÷ÇÔÇÏ´Â À̼۰Ÿ® ¿É¼Ç¿¡¼­ ´Ü 85mm¶ó´Â ±ØµµÀÇ ³·Àº ÇÁ·ÎÆÄÀÏÀ» Á¦°øÇÕ´Ï´Ù.

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¿¡¾î·ÎÅØÀÇ ANT130-XY-ULTRA´Â XYÀÀ¿ëºÐ¾ß¿¡ ´ëÇØ ±ä À̵¿±¸°£(160mm x 160mm±îÁö) ³ª³ëÆ÷Áö¼Å³ÊÀÔ´Ï´Ù. °¢ ÃàÀº ÄÚÅ·ÀÌ ¾ø°í ¡°0¡±¹é·¡½Ã ¸ð¼Ç¿¡ ´ëÇØ ¿¡¾î·ÎÅØÀÇ À¯ÀÏÇÑ ´ÙÀÌ·ºÆ® µå¶óÀ̺ê»Ó¸¸ ¾Æ´Ï¶ó Å©·Î½º ·Ñ·¯ º£¾î¸µ »ç¿ëÇÕ´Ï´Ù. ¶ÇÇÑ, °¢ ½ºÅ×ÀÌÁö´Â ÇÊÀûÇÒ ¼ö ¾ø´Â ³ª³ë¹ÌÅÍ ºÐÇØ´É, Á¤È®¼º, ¹Ýº¹¼ºÀ» ÀÌ·ç±â À§Çؼ­ 2Â÷¿ø º¸Á¤À» ¹Þ½À´Ï´Ù.

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1 nm Best-In-Class Resolution


1 nm step plot for ANT130-XY

1 nm Best-In-Class Resolution


1 nm step plot for ANT130-XY-ULTRA

Max Travel
60, 110, 160 mm
Accuracy ±250 nanometers
Speed
350 mm/s
Load
12 kg
Max Travel
60, 110, 160 mm
Accuracy ±250 nanometers
Speed
350 mm/s
Load
12 kg

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