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    Aerotech

    , 񱳺Ұ ǰ , dz Ͼ ý ƮԴϴ. â ̷ ְ ġ ý Ͽ ϰ Խϴ. ÷ ܴ ƴմϴ. 30⿡ ǥ ý ؿԽϴ. /װ , , ݵü մϴ. Ϲ 뵵 :

    • -  EUV ұ׷
      -  ij ̰ (SEM)
      -  ̿º м

    • -  ̰ (TEM)
    • -  ̿


      -  X Կ

     

     

     

     

     

    Aerotech : ÷ Ʈʷ Ǵ

     

    dz ׽Ʈ ɷ¿ ǰ ý ǰ մϴ. յ ý üμ, ý Ϻϰ ȭ ֽϴ. ý , 𵨸 ǹ Ȱ ð ɼ غϰ ֽϴ.

    ڱ ޱ о߿, ڱ մϴ. ּ ϴ Ͼ ֿ ̸ϴ :


    -
    - ڱ ȸ
    -
    - ý
    - Ʈ

    ü

    UHV ý ࿡ ̻ ȯ ISO Ŭ 6 Ŭ Ը ü ֽϴ. ǰ ش 꿡 մϴ. , ü ǰ ũ ü, ׸ 迡 õ ֽϴ.

    ǥ ǰ ֽϴ. ǥ ÷ ̿ܿ Ư о 䱸 Ǵ ý۵ ̿밡մϴ. ÷ ٿ Ÿ, , µ ּȭմϴ. ̷ ý ڱ о߿ ֿ ֽϴ.

    о :


    • - ǥ

      - Ȱ
      - û
    • -  ŷ
      - ó
      - µ
      - ڱ
      - Ű

     

     

     

     

     

     

    ؿ ִ ɼ

    Level

    Torr

    mBar

    kPa

    Low Vacuum (VAC3)

    1.0 x 10-3

    1.3 x 10-3

    1.3 x 10-4

    High Vacuum (VAC6)

    1.0 x 10-6

    1.3 x 10-6

    1.3 x 10-7

    Ultra-High Vacuum (UHV)

    1.0 x 10-7

    1.3 x 10-7

    1.3 x 10-8


    ִ , о, ۵ µ  ٸ , ս (TML) (CVCM) ϴ پ ɼ ϰ ֽϴ.

    - Ȱ : ذ з Ȱ մϴ.
    - ̺ ý (CMS) : CMS ϴ Ϲ (R) ̾ (MIL-C-27500) Ǵ Kapton PEEK پ Ư Ŀ͸ Բ Ȱմϴ. ġ ɼǵ ֽϴ.
    - ǥ : ǥ Ǻ ˷̴, , η ƿ, Ʈ (Aeroglaze Z306) ɼ ֽϴ.
    - ϵ : ýۿ Ȧ Ȧ Ǵ η ۰ ˴ϴ.

    ׻ ϰ Ͽ ý 䱸 ϰų ̻ ϰ ֽϴ. 

    ǰ

     

    Vacuum Web Page9
    ̵ 1m Ͼ

    thermal_imageµ

    µ Ϳ  ſ , ý ٽ Դϴ. µ ߿ ۵Ǵ ý۰ Ͽ ֽϴ. ش и ɵ ð ߿ ← Խϴ. ̷ ð 带 شȭϰ, Ǵ ϴ Ǵ մϴ.

    Ͼ / ͸ ʹ ֿ ̱ ý 뿡 Ư ߿մϴ. Ưϰ ٷ ͸ / ϰ ֽϴ. Ư ڱ ȸ , ʹ ּ , Ǵ / ũ, ׸ ȭǾ ֽϴ.

    Vacuum Web Page11
    UHV Nema 23 (BMS60) ȸ

    Aerotech-High-Vacuum-Systems-New


    300 mm Ȱ ڱ
    Vacuum Web Page13



     

     

     

     

     

     

     

      

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