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Vertical-Lift Nanopositioners

Ʈ ųʴ ANT95-V ANT130-V մϴ. ׵ ̳ ȯ濡 ϰ Ǿϴ. ̷ ũν ѷ , Ÿ ̷Ʈ ̺ Ʈ ش ( ANT95-V 1nm, ANT130-V 2nm), پ ġ ( ANT95-V <1nm, ANT130-V <2nm), ±200nm Ȯ մϴ. ANT130-V 5mm ̵ 3.0kg ϸ ϴ ݸ, ANT95-V 3mm ̵ 1.5kg ϸ մϴ.

Ȯ, ġ ݺ, ġ ý ش 䱸մϴ. ANT95-V ANT130-V ּ ܰ ̷ մϴ. ǰ Ǹ ġ , Ƽ ũ ũν ѷ  ǰ ǻ ʿ ۵ ϰ մϴ. ̷Ʈ ̺ ̷ Ǵ 鷡ð , Ȯϰ ݺ Ը ϰ մϴ.

ųʴ Ǵ ü Ʈѷ ̺긦 Ͽ ġ Ű ޽ϴ.

ANT95-3-V Series Linear Motor Vertical Lift Stage ANT130-5-V Series Linear Motor Vertical Lift Stage

ANT ø ù ̵ ͱ ġ ýԴϴ. ANT95-V ANT95-V-PLUS Ͼ Ÿ Ʈ Դϴ. پ ANT95η ٸ ϰ յǵ Ǿ, Ȯ ޽ϴ.

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ANT ø ù ̵ ͱ ġ ýԴϴ. ANT130-V ANT130-V-PLUS Ͼ Ÿ Ʈ Դϴ. پ ANT95η ٸ ϰ յǵ Ǿ, Ȯ ޽ϴ.

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1 nm step plot for ANT95-3-V



2 nm step plot for ANT130-5-V

Max Travel
3 mm
Accuracy ?2 ?m
Speed
75 mm/s
Load
1.5 kg
Max Travel
5 mm
Accuracy ?200 nm
Speed
75 mm/s
Load
3.0 kg

ִϸ Ȩ ȯմϴ.
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