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, ȸ, Ʈ 츮 ڽ brushless Ͼ ͻӸ ƴ϶  귯 Ǵ brushless ͸ ͷ ũ ȰϿ Z ġ ܰ ū ϰ ֽϴ. 츮 Ͼ ̺ ̵ Ÿ 25mm 1.5 ͱ پմϴ. ġ κ ø̼ǿ θ Ǹ,  photonics, ý, , , ݵü , Ƿ ǰ , micromachining, Ÿ ڵȭ α׷. 츮 25mm 160mm Ÿ 1  ػ, Ȯ, repeatability - ġ nanopositioning ܰ ü մϴ. ,  Ϻϰ 츮 Ŵ ܰ踦 ϴ ̺ Ʈѷ ϰ ֽϴ.


ִϸ Ȩ ȯմϴ.
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