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AVL1000
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- 뷮

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direct drive

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Ϻ counterbalance

о߿ ARA1000




Lift Stage


AVL1000 Z articulation 䱸ϴ FPD о߿ ݴϴ. ý ü 輺 ϴ ֽϴ. AVL1000 ̷ stage ߰ ũ Ų Ͽϴ. AVL1000 footprint ,  Ҹ ָ μ ߰ ŵϴ. ߻Ű, 䱸 ϴ Ҹ ս׽ϴ.


AVL1000 ȸ ߰  ž ̿մϴ. AVL1000 Ҵ 24ð ȯ濡 ۵ϵ Ǿϴ. Screw Ǵ piezo stage ޸ AVL125 ʿ䰡 ̰ Ⱓ - ۵ մϴ.

Brushless Direct-Drive
ְ positioning , AVL1000 BLMø brushless, slotless linear motor մϴ. ʹ brushless direct-drive -Ǵ brush ϴ , Ӽ, ӵ- ֽϴ. AVL1000 Ͱ cogging force ʱ 뿪 ڵ о߿ ̻Դϴ.

Ȯ
linear ڴ Ͽ positioning ϸ, 0.5nm ش ݴϴ. Ϳ ڴ Բ Ǿ, ̷(hysteresis) μ stage Ȯ ŵϴ.


Ϻ Ű ϴ ȣ stage ý ü ǰ Ҿ amplifier controller մϴ.


ִϸ Ȩ ȯմϴ.
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