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MPS50SL
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  • 50mm ̵Ÿ 50mm
  • ǥ ũ Ǵ ũ ̺
  • DC Ǵ
  • ѷ 
  • ش(0.1um), ݺ(0.75um), Ȯ(1.5um)
  •  

    MPS50SL ȯ濡 ŷڵ ϸ鼭 ѿ Ϻ ϰ Ͼ ġ Դϴ. ̰ ִ о߿ , ׽Ʈ, Ȯ , ǰ ̻ Դϴ.

     

    Ȯ

    ǥ ũ Ǵ ũ Ȯ, ݺ, 0.1ũб ʹ̼ ġ ش մϴ. DC ʹ ͸ ڴ ġ˴ϴ. ѷ Ͼ  Ų ̵ο ̷ε Ư մϴ.

    غ

    MPS50SL 10-6 torr غ մϴ. ݵü ˻, / װ 忡 ó ٷο о߿ Ϻ Դϴ.

    극庸 ÷Ʈ Ʈ 巹庸忡 ̷Ʈ մϴ.  ̵ L-귡Ŷ XY, XYZ Ʈ ֽϴ. ū MPS75SL Ʈ ֽϴ.

    MPS50SL Ͼ, ͸, Ͼ, Ʈ, Z MPS(Miniature Positioning Stage) Դϴ. ǥȭ  ÷Ʈ տ Ǵ ̻ Բ Ʈ ֽϴ.


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