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MPS75SL
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̼۰Ÿ 100mm 75mm

ũ

DC Ǵ

Ƽũ ũν ѷ 

ش (0.1 um), ݺ (0.75 um), Ȯ (1.0 um)

ȣȯ

ο Ŀ ɼ  

 

MPS75SL ȯ濡 ŷڵ ԰ ÿ ѿ Ϻ ִ, Ͼ ġġ Դϴ. ǰ , ׽Ʈ, Ȯ ǰ ̻ Դϴ.

 

 

Ȯ

ũ Ȯ, ݺ ׸ 0.1ũб ʹ̼ ġ ش մϴ. DC ʹ ͸ ڴ ˴ϴ. Ƽũ ũν ѷ Ͼ  ε巯 ̵ Ǹ Ư մϴ.

 


غ

MPS75SL 10-6 torr غ մϴ. ݵü ˻, / װ 忡 ó ٷο о߿ Ϻ Դϴ.

 


ɼ 극庸 ÷Ʈ ġ ʹ 극庸忡 ִ մϴ. ο Ŀ ȯ濡 ϸ,  ̵ L-귡Ŷ XY XYZ ֽϴ. , MPS50SL ֽϴ.

 

MPS75SL Ͼ, ͸, Ͼ, Ʈ, Z MPS(Miniature Positioning Stage) Դϴ. ǥȭ  ÷Ʈ տ Ǵ ̻ Բ ֽϴ.


ִϸ Ȩ ȯմϴ.
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