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Ȯ ũ ϴ û ý ʿ ϴ 䱸 մϴ. ISO Ŭ4(Ŭ10) ɷ ISO 14644-1 Ŭ6 (̿ ǥ 209E Ŭ1000) ǰ ֽϴ. Ʈ ۾ ǰ , ġϰ ֽϴ. ũ ְ µ 20C (0.1C) ǰ ֽϴ.

ũ Ȯ Ʈ 信 ϴ ϳ ǿ̸, ̷ 䱸 ׽Ű ʰϰ ɷ¹ Դϴ.

nanopositioning

ִϸ Ȩ ȯմϴ.
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