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QF-50
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Ư¡

  • 400 um Closed-loop ̼۰Ÿ; 450 um Open-loop ̼۰Ÿ

  • پ step-and-settle ij

  • ũ

  • پ ġ شɰ

  • ġ

  • 29mm ȿ

QFocus? QF-50 ǿ Ŵ ӵ ս

ū ̼۰Ÿ(400 um CL, 450 um OL) ̰ 빰 ġ մϴ.

QF-50 ο ̼ ø̼ ϱ ȵǾϴ.

, QF-5 ũ 빰 Ͽ ǿ ijʸ ɰ ֽϴ.

QF-50 ̼۰Ÿ յ ó ʿ ϴ ٷο ġ ø̼ǿ մϴ.


QFocus QF-50 ǿ м ȭ ϴ.

QFocus QF-50 پ ó

Closed-loop ϰ ϴ ļ մϴ.

Ư λӸ ƴ϶, ϰ Ű QF-50 ü ̼۰Ÿ ģ

40nm ֽϴ.

 

ǵ

QF-50 ǿ شɰ ϰ ϴ Ư 뷮 ̿

Closed-loop ǵ(-C) ɼ ֽϴ. Ʈ ʹ ޸,

뷮 پ Ȯ ݺ ϰ ϴ ġ ɸ մϴ.

 

ϰ Ȯ Ʈ

Qø Ʈѷ ̺ , QF-50 ġ 뿪 ϸ鼭

ġ شɰ ġ () մϴ.

Ʈ ɼ(̳ Ʈ ڽ ̳) н, , ׸

ǰ Ͽ, step-and-settle ð մϴ.


ġ

QFocus QF-50 ִ Ͱ κ ̰ ü ֵ մϴ.

̰ ž ġ ϴ  ε QF-50 ġ ϰ մϴ.

Ӹ ƴ϶, ̽ Ǵ

ٸ ġ ü ġ ֵ ݴϴ.

QF-50 29mm ޷ֽϴ.

ֹ , ̼۰Ÿ, ׸ ִ Ͱ մϴ. 


ִϸ Ȩ ȯմϴ.
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