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WaferMax Z
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- о߸ ߾

direct-drive

ݺ

Ϻ counterbalance

о߿ WaferMax T ռ


WaferMax Z 1 Ʈ Ű - Ҹ ϴ ݴϴ. ü linear ̺ direct position ǵ Ͽ - ڴ äϰ ֽϴ. MXH multiplier Ͽ, ӵ Ȯ Ҿ 0.83nm ش մϴ.


 ǰ ְ ε巯 ŷڼ Ͽ cross-roller Դϴ. ǰ Ű, base žϿ //߰ ϸ鼭 ˴ϴ.

WaferMax Z ߿ Ҵ 24ð ȯ濡 ۵ϵ Ǿϴ. Screw Ǵ piezo stage ޸ WaferMax Z ʿ䰡 ̰ Ⱓ - ۵ մϴ.

Brushless Direct-Drive
ְ positioning , WaferMax Z BLMUC-ø brushless, slotless linear ͸ մϴ. ʹ brushless direct-drive - Ǵ brush ʿ (֪) , Ȯ ӵ - ֽϴ. ̰ slotless, ironless ̱ , cogging ũ ripple ϴ. ̰ WaferMax Z motion, Ȱ scan ӵ, Ǵ step ̻ ϴ.

Ȯ positioning
linear ڴ ϸ, 0.8nm ش ݴϴ. Ϳ linear ڴ Ȯ Ű ˴.

ռ
Ϻ Ű ϱ amplifier controllers մϴ.


 


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