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Nanopositioning System Requirements

Ŵ ý , , ̼۰Ÿ, , Ȯ, ش, ׸ ϱ Ʈ ϱ Ͽ ̷ ũ 䱸 ߱ Ϸ ǰ ϱ , ڱ, , ǻ, Ʈ ý, ý о߿ 40 ξϴ.

nanopositioners and nanopositioning stages

Ư ̼۰Ÿ Ŵ ǰ Ϳ arc-second ϱ Ȯ 䱸ϴ ø̼ǵ ҿ ø̼ǵ鿡 մϴ.  Ŵ 2 Ͼ ųʸ ϸ ̵ 1 ش, dia.250 Ȯ, ׸ 25mm 160mm ̼۰Ÿ ֽϴ. ͸ Ŵ ǰ 0.01 arc-second ش, 0.005 arc-second In-position stability, rmflrh 360 Ӿ ȸ մϴ. ݸ鿡 Ŵ Ͼ͵ 0.05arc-sec ش, 20 ȸ , ׸ ʴ 150 ӵ մϴ. Vertical lift 1nm ش Z Ŵ Ͽϴ. <1nm in-position stability 60mm ̼۰Ÿ. ٿε PDF  Ǵ ϵīǷ. ī޷α׸ .  ¶ο ü Ŵ ǰ Ȯ ֽϴ.

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