Ȩ > ǰҰ > AEROTECH >
͸

𵨰 Բ, ü 귯 ͸ ͸ ϴ ̷Ʈ ̺ ϴ پ ͸
̺ մϴ. ڵȭ о߿ ̻ ذå ϱ پ ũ , ̺ , ׸
ž ɼ մϴ. 鸲 ƿ ι Źմϴ.

̺ κ, , , ý, ۱, , ݵü , Ƿ , , Ÿ

ڵȭ о߿ θ ϴ. , ü ͸ ̺ Ϻ ϴ ̺ Ʈ ַ

ϰ ֽϴ.


 
͸ 


躣


躣


 


͸ 

 
ABRS ͸ 

ABRSø, ͸

󿡼 ġ
, ӵ , ׸
մϴ. ABRS
, , X-ray ȸý,
˻ , ׸ MEMS/
ġ м信
ϰ Ǿϴ.

Tabletop Diameter
128.1-278.1 mm
Resolution
0.18-0.036 arc sec
Bidirectional Repeatability
<1 arc sec

ABRT ͸ 

ABRTø ͸
 λ
Ź ݰ ߰
Բ ġ, ӵ
, ׸
մϴ.




Tabletop
Diameter
100-200 mm
Resolution
0.055-0.027 arc sec
Bidirectional Repeatability
<1 arc sec

 


 ͸


ADRT ͸

ADRT ø
͸ ġ
ӵ  մϴ.
ε̿
˻ н
ϴ.


Diameter
146 - 260 mm
Accuracy
30 arc sec
Load
30 - 173 kg

ADRS ͸


ADRSø Ʈ

մϴ.




Diameter
95 - 190 mm
Accuracy
6 arc sec
Load
16.9 - 56.2 lb

ARMS ͸

ARMS ø
͸ ùķʹ MEMS, ̷
, , װڰ,
ӵ ǰ ý
, Ӽ ġ
մϴ.


Aperture
8 mm - 25 mm
Resolution
0.02 - 2 arc sec
Accuracy (Calibrated)
2.5 arc sec


ALAR ͸

ALARø   
͸
ū ũ⸦
ġ ӵ մϴ.
   
, ALAR ø -

ϴ.


Max Aperture

325 mm

Accuracy

3.9 arc sec

Load

6463 N


ARA1000 ͸ ߿

ARA1000 ͸ ߿
ʹ Ͽ κп
䱸ϴ dz ÷
о߸
ǰ ǥմϴ.
 



Diameter
342.9 mm
Accuracy
2 arc sec
Load
45 kg

ASR1000 ͸

ASR1000 ø 
͸ 谡
ٷο 並 Ű
Ǿϴ. - Ϳ
ڴ ӵ Ȯ ̻
ϴ.



Diameter
19 mm
Accuracy
15 arc sec
Load
3.0 kg

ASR1100 ͸

ASR1100 ø
̾ ASR1000 
͸ ļǰԴϴ.
ASR1100 н ۵ ݷ
ô ߰Ͽ, ڹ ó
Ͽ ݴϴ.


Max Aperture
14 mm
Accuracy
15 arc sec
Load
3 kg

ASR1200 ͸

ASR1200 ø
̾ ASR1000   ͸
ļǰԴϴ.
ASR1200 ڵȭ ó
к
н ۵ ݷ ô
մϴ.


Max Aperture
5.8 mm
Accuracy
15 arc sec
Load
3 kg

ACS ͸

ER ݷ ô Ǵ 3-jaw ׸
ACS ø ͸
о
ڵ ó մϴ.




Max Aperture
30 mm
Accuracy
15 arc sec
Load
140 kg


ACS LP ͸  

 

ER ݷ ô
ACS LP ø ͸
о߿ ڵ
ó մϴ.



 

 


Max Aperture
30 mm
Accuracy
6 arc sec
Load
41 kg


WaferMax T

 

Wafermax T ͸
Ű
䱸ϴ о߿ Ź
˴ϴ.
˻縦 Ǿ, ٸ
о߿ Ǿ Խϴ. ǥ
25mm ѵ ȸ 䱸Ǵ
ϰ
մϴ.

 

 

Diameter
106.7 mm
Accuracy
5 arc sec
Load
40 kg

ALAR-XP

 

ALAR     ũ ͸

ϱ  Ϲ   

õ ,      ξ

  ӵ ӵ  ϴ. ̷

  ý Ȯ, ݺ,   ó

̾   ǰ  ª ð 

 Ȯϰ , ˻ Ǵ ó  ־ 

 ߰      ְ ݴϴ.



 ͸


AGR   ͸

ARR ø ͸
ǰ
پ о߸
뱸 Ӱ Բ
, Ͽ뷮, Ⱓ ġ
ɵ
ϴ.


Aperture

50 mm - 200 mm

Accuracy

20 arc min

Axial Load

90 kg - 570 kg

rotary stage


MPS-GR ͸

MPS-50GR MPS-75GR ͸
ſ ̸鼭
󿡼 ſ ġ
մϴ. ̴ MPS-GR
ø Ͼ ġ
̸,
ڵȭ ʿ Ʈ
ΰ ۾ -
о߿ ̻ Դϴ.


Diameter

50 mm

Accuracy

80 arc sec

Load

4.0 kg

 


                                      
                                                       

 

 

 


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