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AHL9000
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   ĵ ; 

Ͼ

̵Ÿ 1.2m * 1.2m

Linear ڴ Ǵ (interferometer) ǵ

  

 

 

 

AHL9000 Air Bearing stage ֽű, ݰ ʿ о߿ Ź Դϴ. stage step ˻缺 䱸ϴ о 信 ߰ Ǿ, ˻, FPD , ׸ ˻ о߿ ˴ϴ.

 

̺긮 
AHL9000 Scan ABL9000  ߵ (Air Bearing) Ͽ Ǿϴ. ߰ ⵿ Ͽ ǥ ο ɵ մϴ. , AHL9000 step ࿡ 躣 Ͽ -ȿ ϴ. ̷ ϳ stage  Ͽ step Scan ۾ ý մϴ.

 

Linear ̺
stage 濡 BLMC ø Brushless Linear Servo Motor ֽϴ. μ ο ݿǾ ֽϴ. BLMC Ironless Forcer ϴµ Zero cogging -η(no attractive forces) Ȱ ݴϴ. ӵ ־, BLMC Ŀ ְ ̶ Ҹϴ.


AHL9000 ø 鸸 1 ݺ Ͼ ڴ ǥػ ˴ϴ. ǥ е ߰ , ξ (yaw) ɼ 2D (factory calibration) մϴ.

 


ٳⰣ Maintenance Free ϱ 輱 ݰ Ͽ ȭϿϴ. ϳ ߻ , ߴ ð ּȭϱ 輱ü ż ϵ Ǿ ֽϴ. ýۿ ϵ 츮 CMS(輱ý) ʿ ϴ 輱, ȣ, Խ׽ϴ. 迡 ǵ Ŀ óǾ ֽϴ


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